Nidek Flatness Tester
FT-900 Flatness Tester The FT-900 Series uses laser oblique incidence interferometry and phase shift fringe analysis to measure wafer flatness with high accuracy. This instrument is suitable for a wide range of applications from R&D to mass production lines.
Key Features
-
Versatile sample compatibility
Capable of measuring a variety of samples including silicon, SiC, GaN, sapphire wafers, aluminium, glass wafers and metal pieces.
-
High-precision measurement
Phase-shift analysis compatible with multiple interference fringes reduces back-side interference in transparent samples.
-
Automatic calibration
No calibration required by the user; performed by NIDEK-certified personnel at shipping and during regular inspections.
-
Rich options
Offers a wide range of options to meet various measurement needs.
Corporate Introduction
Nidec Corporation was established in 1971 in Aichi Prefecture. The company has developed its business in the three fields of medicine, ophthalmic instruments and coatings, and in recent years has been providing precision interferometer technology for semiconductor wafer flatness measurement. In particular, the FT-900 series provides high precision flatness measurement for a wide range of wafer materials including silicon, SiC, GaN and sapphire.
