LayTec in-situ Measurement System
Product Overview
Ceramic Forum offers in-situ monitoring systems and wafer mapping systems from LayTec AG (Germany) for deposition equipment.
The real-time monitoring systems provide highly accurate measurements of deposition rate, film thickness, substrate curvature and wafer surface temperature during epitaxial growth processes using various deposition tools such as MOCVD and MBE.
These systems also support nanostructuring.
In deposition processes for materials such as GaN, the actual surface temperature of the wafer is considered the most critical condition.
This system measures the temperature in real time with an accuracy of ±1K.
Higher end models offer even more advanced measurement and analysis capabilities.
They support multi-wafer susceptors and allow selective measurement of individual wafers.
In addition, mapping systems are available that can be linked to data from in-situ instruments.
Product Features
Real-time measurement of actual substrate surface temperature (±1K), with continuous external output available
Detection of surface and interfacial roughness
Deposition rate measurement (accuracy within ±1%)
Structural analysis based on substrate curvature (EpiCurve® series)
Multi-axis curvature measurement (AR Series supports non-spherical curvature)
Optional blue laser available (ideal for patterned and double-sided polished wafers)
Simultaneous measurement of reflectance, temperature and curvature
Full spectrum (UV-VIS-IR) reflectance measurement available in addition to three wavelength models
Automatic analysis of dip wavelength position and stop band width during VCSEL structure growth
In-situ monitoring system range
| Series: | Surface temperature (IR pyrometer) |
deposition rate | substrate curvature | multi-head | surface temperature (UV pyrometer) |
|---|---|---|---|---|---|
| EpiTT | ✔ | ✔ | |||
| EpiCurve@TT | ✔ | ✔ | ✔ | ||
| VCSEL | ✔ | ✔ | ✔ | ✔ | |
| Pyro400 | ✔ |
Other tools available include AbsoluT (ideal for equipment maintenance temperature calibration) and mapping systems.
Mapper system features
Supports mapping up to 200mm x 200mm
Thickness distribution measured via full spectrum reflectance (UV-VIS-IR)
Supports mapping of PL, curvature, sheet resistance, transmittance, etc.
Analyses dip wavelength position and stop band width of VCSEL structures
Manufacturer Introduction
LayTec AG (Germany)
Founded in 1999, LayTec is the leading company in the field of In-situ epitaxial sensors.
Since 2009, the company has been ranked as one of the 50 fastest growing technology companies in Germany for three consecutive years.
In 2011, the company added further value to its technology by acquiring ORS (Optical Reference Systems) as a subsidiary.
The company currently has more than 2,500 measurement systems installed worldwide, with 75% in Asia, 10% in North America and 15% in Europe.
