LayTec Epi In-situ Monitoring System
The LayTec EpiX Wafer Mapper is a high precision wafer mapping system using optical reflectance and photoluminescence. It is designed to improve quality control and productivity in semiconductor manufacturing processes.
Key features
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Highly accurate real-time measurement
Fibre-based measurement head and dedicated controller for optimized performance and accuracy.
Low spectral noise, excellent absolute accuracy and 2D measurement uniformity.
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Flexible modular design
Configurable for open cassette, SMIF and FOUP loading ports.
Supports wafers up to 300mm in diameter, ensuring high throughput for industrial use.
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Automation and robotic loading
Allows automation between cassettes to support high throughput.
Equipped with dedicated fan filter unit for wafer handling and measurement in clean room environments.
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Advanced analysis functions
Provides comprehensive data analysis tools such as Fourier transform, Laplace transform and multi-exponential transient fitting.
Incorporates LayTec Connected Metrology system to import wafer-specific measurement results and optimize 2D mapping analysis.
Manufacturer Introduction
LayTec(Germany)
Founded in 1999 as a spin-off from the Technical University of Berlin, LayTec has over 25 years of experience and has sold more than 3,500 systems worldwide. As a member of the Nynomic AG group, LayTec is a leading company in optical measurement technologies.
