LayTec Epi In-situ Monitoring System

The LayTec EpiX Wafer Mapper is a high precision wafer mapping system using optical reflectance and photoluminescence. It is designed to improve quality control and productivity in semiconductor manufacturing processes.

Key features

  1. Highly accurate real-time measurement

    Fibre-based measurement head and dedicated controller for optimized performance and accuracy.

    Low spectral noise, excellent absolute accuracy and 2D measurement uniformity.

  2. Flexible modular design

    Configurable for open cassette, SMIF and FOUP loading ports.

    Supports wafers up to 300mm in diameter, ensuring high throughput for industrial use.

  3. Automation and robotic loading

    Allows automation between cassettes to support high throughput.

    Equipped with dedicated fan filter unit for wafer handling and measurement in clean room environments.

  4. Advanced analysis functions

    Provides comprehensive data analysis tools such as Fourier transform, Laplace transform and multi-exponential transient fitting.

    Incorporates LayTec Connected Metrology system to import wafer-specific measurement results and optimize 2D mapping analysis.

Manufacturer Introduction

LayTec(Germany)

Founded in 1999 as a spin-off from the Technical University of Berlin, LayTec has over 25 years of experience and has sold more than 3,500 systems worldwide. As a member of the Nynomic AG group, LayTec is a leading company in optical measurement technologies.