EpiQuest KOH Etching/MOCVD/MBE/Oxidation Equipment
Key features
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Safe operation
Allows sample removal in a low temperature environment without direct exposure to KOH vapour.
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Fully automated
All processes including wafer rotation, basket lift, thermocouple insertion/removal and crucible shutter control are automated.
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Data logging
Log data is stored in internal memory and can be exported to USB.
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CE Compliant
Designed with safety in mind to meet European standards.
Other products from EpiQuest:
MBE System
Ideal for R&D and production of materials such as ZnO and Nitride semiconductors.
MOCVD system
Used for epitaxial growth of compound semiconductors.
Oxidation system
Compatible with VCSEL oxidation processes.
Ultra-high temperature furnace
Supports various high temperature processes.
Cooperate Introduction
EpiQuest Inc. specializes in epitaxial technology and provides KOH etch systems that are particularly suitable for processing SiC wafers. They also have extensive experience in the design and manufacture of MBE and MOCVD systems.
KOH Etch System (ETC-8001CE): EpiQuest's KOH Etch System can safely and automatically perform high temperature etch processes to expose etch pits on SiC and GaN wafers. The system automates all steps of the etching process and can be operated without direct human contact, making it safe and easy to maintain.
