Phystech DLTS measurement equipment
The Phystech DLTS measurement system (FT1230) is a highly sensitive system for evaluating defects in semiconductor materials. In addition to the high sensitivity required for DLTS measurements, this system is equipped with advanced software compatible with various semiconductor materials.
Key Features
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Multiple Measurement Modes
In addition to the basic DLTS measurement mode, it includes ICTS (Isothermal Capacitance Transient Spectroscopy) mode for time-domain measurement at fixed temperatures.
It also supports several other methods such as optical DLTS/ICTS using light pulses, constant capacitance mode (CC-DLTS), current mode DLTS/ICTS, PITS (Photo-Induced Current Transient Spectroscopy), and TSC (Thermally Stimulated Current) measurements.
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High sensitivity measurements
Current mode and DLTS/ICTS measurements can also be used to evaluate defects in three-terminal devices such as FETs.
The unique hardware/software design achieves current sensitivity of 0.01 fF, trap detection sensitivity of 10^-7 and energy accuracy of ±3%.
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Wide range of measurement applications
It supports a wide range of applications, including trap concentration distribution measurements, direct measurement of capture cross section using the capture pulse method, and Zerbst analysis.
With the HERA-DLTS system, it is possible to separate neighboring energy levels, which are difficult to distinguish in DLTS spectra, using new mathematical algorithms.
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Advanced software
Provides a wide range of data analysis functions including Fourier transform, Laplace transform, multi-exponential transient fitting, ITS (Isothermal Transient Spectrum) signal deconvolution and Tempscan signal deconvolution.
Technical Specifications
Current sensitivity: 0.01 fF
Trap detection sensitivity: 10^-7
Energy accuracy: ±3%
Product Options
FT-1230 DLTS System: Standard DLTS measurement system
FT-1235 CGI Meter: Standard 1 MHz CGI meter
FT-1237 High Voltage CGI Meter: 500V/600V High Voltage CGI Meter
FT-1243 Triple frequency CGI meter: Fixed frequencies of 250kHz, 1MHz and 2.5MHz
FFT-1245 Multi-frequency CGI meter: Allows multi-frequency scanning
FT-125X Switch Box: Switches between LCR and CGI meters
LCR Option: Additional board for static and dynamic measurements
Manufacturer Information
Phystech GmbH (Germany).
Phystech is a specialized manufacturer of DLTS measurement systems from the University of Kassel, Germany.Released in 2016, the FT-1230 has the most diverse measurement modes compared to the competition and is the only system that can meet the requirements of researchers in all materials.
